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  • · Reactive Species Generated during Wet Chemical Etching of Silicon in HF/HNO3 Mixtures 展開

    Marco Steinert. Jorg Acker.  Matthias Krause.  Steffen Oswald.  and Klaus Wetzig. J. Phys. Chem. B 2006, 110, 11377-11382.


  • · Experimental Studies on the Mechanism of Wet Chemical Etching of Silicon in HF/HNO3 Mixtures 展開

    M. Steinert, J. Acker, A. HenBge, and K. Wetzig. Journal of  The Electrochemical Society, 152 (12) C843-C850 (2005).


  • · Acid-Based Etching of Silicon Wafers: Mass-Transfer and Kinetic Effects 展開

    Milind S. Kulkarni and Henry F. Erk. Journal of  The Electrochemical Society, 147 (1) 176-188 (2000). 

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